Мишени
Диаметр 100 ± 0.2 мм
Diameter 100 ± 0.2 mm 100 ± 0.2 mm 100 ± 0.2 100 ± 0.2
Type / Dopant P/Boron P/Boron N/Phosphorus Customer Specified
Orientation <100> ± 1° <100> ± 1° <100> ± 1° Customer Specified
Growth Method Cz Cz Cz Cz
Resistivity 10 - 30 Ω-cm 1 - 100 Ω-cm 1 - 100 Ω-cm Customer Specified
Thickness 500 - 550μm 450 - 550μm 500 - 550μm Customer Specified
TTV < 10μm <= 10μm Customer Specified
TIR < 6μm
Front Surface Polished Polished Polished Polished
Back Surface Etched Polished Etched Customer Specified
Particle Count < 10 @ 0.3
Flats 2 SEMI Standard 2 SEMI Standard 2 SEMI Standard 2 SEMI Standard
Edges Rounded and polished per SEMI Standard Rounded and polished per SEMI Standard Rounded and polished per SEMI Standard Rounded and polished per SEMI Standard
Диаметр 125 ± 0.2 мм
Diameter 125 ± 0.2 mm
Type / Dopant P/Boron
Orientation <100> ± 1°
Growth Method Cz
Resistivity 10 - 20 Ω-cm
Thickness 600 - 650μm
TTV < 10μm
Bow / Warp < 40μm
Front Surface Polished
Back Surface Etched
Particle Count <= 10 @>= 0.3μm
Flat 2 SEMI Standard
Edges Rounded and polished per SEMI Standard
Диаметр 150 ± 0.2 мм
Diameter 150 ± 0.2 mm 150 ± 0.2 mm 150 ± 0.2 150 ± 0.2
Type / Dopant P/Boron N/Phosphorus P/Boron P/Boron
Orientation <100> ± 1° <100> ± 1° <100> ± 1° <100> ± 1°
Growth Method Cz Cz Cz Cz
Resistivity 1 - 30 Ω-cm 1 - 30 Ω-cm 10 - 30 Ω-cm 10 - 30 Ω-cm
Oxygen Content 27 - 33 ppma
Oxygen Stacking Faults (OSF) <= 100/cm²
Carbon Content <= 1.0 ppma
Metals < 5x10E
Thickness 650 - 700μm 650 - 700μm 660 - 690μm 660 - 690μm
TTV < 10μm <= 5μm <= 3μm <= 10μm
Bow / Warp < 40μm < 40μm < 40μm < 40μm
Site Flatness (STIR) < 1μm < 1μm < 0.2μm < 4μm
Front Surface Polished Polished Polished Polished
Back Surface Etched Etched Etched Etched
Particle Count <= 30 @ >= 0.2μm <= 30 @ >= 0.2μm <= 20 @ >= 0.2μm <= 30 @ >= 0.2μm
Flats 2 SEMI Standard 2 SEMI Standard 2 SEMI Standard 2 SEMI Standard
Edges Rounded and polished per SEMI Standard Rounded and polished per SEMI Standard Rounded and polished per SEMI Standard Rounded and polished per SEMI Standard
Диаметр 200 ± 0.2 мм
Diameter 200 ± 0.2 mm 200 ± 0.2 mm 200 ± 0.2 200 ± 0.2 200 ± 0.2 200 ± 0.2
Type / Dopant P/Boron P/Boron P/Boron P/Boron P/Boron P/Boron
Orientation <100> ± 1° <100> ± 1° <100> ± 1° <100> ± 1° <100> ± 1° <100> ± 1°
Growth Method Cz Cz Cz Cz Cz Cz
Grade Epi
Resistivity 10 - 30 Ω-cm 10 - 20 Ω-cm 1 - 100 Ω-cm 1 - 50 Ω-cm 0.005 - 0.02 Ω-cm Customer Specified
Metals < 5xE9 < 5xE10 < 5xE10 < 5xE9
Thickness 700 - 750μm 710 - 740μm 700 - 750μm 700 - 750μm 700 - 750μm 700 - 750μm
Epi Layer Thickness Customer Specified
TTV < 3μm <= 6μm <= 4μm <= 10μm <= 5μm <= 10μm
GTIR < 5μm <= 5μm
Bow / Warp < 40μm < 40μm < 40μm < 50μm < 40μm < 40μm
Site Flatness (STIR) < 1μm < 2μm < 0.2μm < 1μm
Front Surface Polished Polished Polished Polished Polished Polished
Back Surface Etched Etched Etched Etched Etched Etched or Oxide Back Seal
Particle Count <= 50 @ >= 0.12μm <= 50 @ >= 0.16μm <= 50 @ >= 0.16μm <= 30 @ >= 0.2μm <= 50 @ >= 0.16μm
Flats SEMI Standard SEMI Standard SEMI Standard SEMI Standard SEMI Standard SEMI Standard
Edges Rounded and polished per SEMI Standard Rounded and polished per SEMI Standard Rounded and polished per SEMI Standard Rounded and polished per SEMI Standard Rounded and polished per SEMI Standard Rounded and polished per SEMI Standard
Диаметр 300 ± 0.5 мм
Diameter 300 ± 0.5 mm 300 ± 0.5 mm 300 ± 0.5 mm 300 ± 0.5 mm 300 ± 0.5 mm 300 ± 0.5 mm P+ 300 ± 0.5 mm P+ 300 ± 0.5 mm P+ 300 ± 0.5 mm
Type / Dopant P/Boron P/Boron P/Boron P/Boron P/Boron P/Boron P/Boron P/Boron P/Boron
Orientation <100> ± 1° <100> ± 1° <100> ± 1° <100> ± 1° <100> ± 1° <100> ± 1° <100> ± 1° <100> ± 1° <100> ± 1°
Growth Method Cz Cz Cz Cz Cz Cz Cz Cz Cz
Resistivity 1 - 30 Ω-cm 1 - 30 Ω-cm 1 - 30 Ω-cm 1 - 100 Ω-cm 1 - 100 Ω-cm 1 - 100 Ω-cm 0.005 - 0.02 Ω-cm 0.005 - 0.02 Ω-cm 0.005 - 0.02 Ω-cm
Radial Resistivity Gradient (RRG) <= 10% <= 10%
Oxygen Concentration <= 30 ppma <= 30 ppma
Carbon Concentration <= 1 ppma <= 1 ppma
Surface Metals <= 1xE10 <= 1xE10
Thickness 750 - 800μm 750 - 800μm 750 - 800μm 750 - 800μm 750 - 800μm 750 - 800μm 750 - 800μm 750 - 800μ 750 - 800μm
TTV < 2μm <= 2μm <= 2μm <= 2μm <= 2μm <= 2μm <= 2μm
GTIR < 5μm <= 5μm
Site Flatness (STIR) < 0.25μm < 0.25μm <= 0.13μm
Bow / Warp < 40μm < 40μm < 40μm
Front Surface Polished Polished Polished Polished Polished Polished Polished Polished Polished
Back Surface Polished Polished Polished Polished Polished Polished Polished Polished Polished
Particle Count <= 50 @ >= 0.09μm <= 50 @ >= 0.12μm <= 50 @ >= 0.16μm <= 30 @ >= 0.2μm <= 100 @ >= 0.2μm <= 50 @ >= 0.12μm <= 50 @ >= 0.16μm <= 200 @ >= 0.2μm
Notch SEMI Standard SEMI Standard SEMI Standard SEMI Standard SEMI Standard SEMI Standard SEMI Standard SEMI Standard
 

Тел.: +7 (495) 229-96-41 (42)

E-mail: Этот e-mail адрес защищен от спам-ботов, для его просмотра у Вас должен быть включен Javascript

© «ЭкоТайм» 2008-2010